| Modél Mesin | FL-L12025 | FL-L13025 | FL-L16030 |
| Wewengkon Gawé (mm) | 12000*2500 | 13000*2500 | 16500*3200 |
| kakuatan Generator | 3000-20000W | ||
| X / Y-sumbu Positioning Akurasi | 0,02 mm/m | ||
| X / Y-sumbu Repositioning Akurasi | 0,03 mm/m | ||
| X/Y-sumbu Max. speed beungkeutan | 80m / mnt | ||
| Akselerasi maksimum | 1.2G | ||
| Sasayogian tanaga | Tilu fase 380V / 50Hz 60Hz | ||