| Tshuab Qauv | FL-L12025 | FL-L13025 | Qauv TSIS MUAJ: FL-L16030 |
| Chaw ua haujlwm (mm) | 12000 * 2500 hli | 13000 * 2500 hli | 16500 * 3200 hli |
| Lub zog ntawm Generator | 3000-20000 W | ||
| X/Y-axis Positioning raug | 0.02mm / m | ||
| X/Y-axis Repositioning raug | 0.03mm / m | ||
| X/Y-axis Max. kev sib txuas ceev | 80m / min | ||
| Qhov siab tshaj plaws acceleration | 1.2g ua | ||
| Fais fab mov | Peb theem 380V / 50Hz 60Hz | ||