| Modail Inneal | FL-L12025 | FL-L13025 | FL-L16030 |
| Raon-obrach (mm) | 12000 * 2500 | 13000 * 2500 | 16500 * 3200 |
| cumhachd an Gineadair | 3000-20000W | ||
| Cruinneas Suidheachaidh X/Y-axis | 0.02mm/m | ||
| Cruinneas Ath-shuidheachaidh Axis X/Y | 0.03mm/m | ||
| Astar ceangail as àirde aig axis X/Y | 80m/mion | ||
| Luathachadh as motha | 1.2G | ||
| Solar cumhachd | Trì ìrean 380V/50Hz 60Hz | ||